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Phosphorus Oxychloride Semiconductor Grade


Formula:
POCl3 
Formula weight: 153.35
Product specification:

Analysis Items

Specs index(ppb)Max

Analysis Items

Specs index(ppb)Max

6N

7N

6N

7N

As,max

30

6

Mg,max

20

5

Ba,max

20

1

Mn,max

30

1

Ca,max

30

5

Ni,max

20

1

Co,max

20

1

Pb,max

10

3

Cu,max

20

2

Sr,max

5

1

Cr,max

20

1

Ti,max

5

2

Fe,max

40

5

Zn,max

5

1

Al,max

40

5

K,max

30

3

Ag,max

1

1

Li,max

10

6

Au,max

1

1

Na,max

10

5

Bi,max

10

1

Nb,max

2

1

Ga,max

1

1

Sn,max

5

1

Hg,max

10

5

Assay 

99.9%

99.9%

Color

5

5

Particles in bottles: Size,#/ml

0.3um, 50Max

0.3um, 50Max



PROPERTY:
It is colorless, transparent and volatile liquid with strong stimulating odor. POCl3 easily hydrolyzes to form H3PO4 and HCl when exposed to wet air. Melting point: 1.25℃, Boiling point: 102℃, Relative Density: 1.675, Evaporating heat: 33.7kj/mol.It is stable even if the temperature is around 300℃ When POCl3 reacts with too much water, it will rapidly produce H3PO4 and HCl, and if this reaction takes place in a very limited container, explosion may happen. POCl3 is toxic and corrosive. Cut with objects: strong reducing agent, reactive metal powder, water, alcohols.

APPLICATION:

As critical process chemical in IC chip fabrication, POCl3 is primarily used as a liquid phosphorus source for N-type doping in the fabrication of IC, solar cell and some semiconductor discrete components. It is used in optical fiber as anti-refraction doping source, and also used as the stuff of forming high-purity Phosphoric Acid.

PACKING :
Quartz bubbler bottle, Including 500mL?1000mL?1500mL three specifications.

Bottled specifications(mL)

500

1000

1500

Pack quantity(bottle)

12

6

4

Net Weight(kg)

6

6

6

 


 


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